DM-MA08 Piezo Micro Actuator, 8 µm Stroke, 0.1 nm Resolution

Overview

The DM-MA08 is a solid-state actuator: a stack of ceramic layers expands when voltage is applied, with no gears, screws or bearings in the motion path. There is nothing to wear and nothing to develop backlash, and the response is fast enough to be used for active vibration damping as well as static positioning.

Resolution is limited by the driver noise, not by the actuator, and reaches 0.1 nm with a low-noise amplifier. The trade-off is stroke: 8 µm open loop, or 10 µm with the optional strain gauge feedback for closed-loop control that removes hysteresis and creep.

Key features

• 8 µm open-loop stroke, 10 µm with closed-loop feedback
• 0.1 nm resolution with a low-noise driver
• Microsecond response, suitable for active damping
• Optional integrated strain gauge for closed-loop control
• Vacuum-compatible version for chamber use
• Preloaded housing for push and pull operation

Typical applications

• Optical path length and mirror alignment
• Nanometre positioning on inspection stages
• Active vibration cancellation
• Micro-dispensing and valve actuation

Driver requirement

A piezo actuator needs a dedicated amplifier, not a DC supply. We supply a matched 0-150 V amplifier with USB and 0-10 V control, and we recommend ordering actuator and amplifier as a pair so the calibration covers both.