Micro Actuators & Precision Motion Components
Sub-millimetre positioning for optical, analytical and micro-assembly equipment, where the actuator has to be small, repeatable and quiet at the same time.
Need a specific variant?
Ranges, threads, connectors and cable lengths can be modified at the factory from 50 pieces.
Request a quote Ask an engineerLead time5-14 days
CalibrationIncluded
Custom buildFrom 50 pcs
When a mechanism has to move 50 µm and stop within 100 nm, the actuator becomes a metrology component rather than a drive. Thermal expansion, backlash and cable stiffness all matter as much as the nominal stroke. DuoMy supplies micro actuators with the matching controller and, where needed, an integrated position sensor so the closed loop is defined by the manufacturer rather than assembled on site.
The range has three families. Linear micro actuators use a precision screw and a stepper or brushless motor for strokes up to 50 mm with micron-level repeatability. Piezo actuators deliver nanometre resolution and microsecond response over a stroke of a few micrometres. Miniature rotary actuators cover valve, shutter and indexing duties where a conventional gearbox is too large.
Typical customers are analytical instrument builders, semiconductor tool makers, optical assembly houses and medical device manufacturers. For these applications we also supply the flexure stages, the driver electronics and the calibration report, because separating the mechanics from the electronics usually moves the error into the integration.
Range Overview
Micro Actuators variants
Each variant exists because a different application needs it. The distinction is usually mechanical or environmental rather than a better accuracy figure.
Linear Micro Actuators
1 µmMotorised screw drives from 10 mm to 50 mm stroke with 1 µm resolution, optional integrated encoder and limit switches.
Piezo Stack Actuators
0.1 nmSolid-state displacement from 2 µm to 100 µm with sub-nanometre resolution and microsecond response, for optics and vibration control.
Miniature Rotary Actuators
0.5-10 N·mGeared and direct-drive rotary units from 0.5 N·m to 10 N·m for shutters, valves and indexing heads.
Voice Coil Actuators
FrictionlessFrictionless short-stroke force actuators for active damping, haptics and fast focusing.
Flexure Stages
No backlashMonolithic hinge stages that remove stick-slip and backlash from the motion path, supplied with or without actuation.
Catalogue
Micro Actuators in stock and made to order
DM-MA08-PZ-8UM
DM-MA08 Piezo Micro Actuator, 8 µm Stroke, 0.1 nm Resolution
DM-MA25-LIN-80
DM-MA25 Linear Micro Actuator, 25 mm Stroke, 80 N
Technical Range
Typical specifications
Figures below are the range across the family, not a single model. Specify the exact range, accuracy and connection on the quote request and we will confirm which variant meets it.
Request a specification check| Parameter | Typical |
|---|---|
| Stroke | 8 µm to 50 mm |
| Resolution | 0.1 nm to 1 µm |
| Blocking force | 5 N to 500 N |
| Repeatability | ±0.05 µm to ±2 µm |
| Speed | 0.1 mm/s to 50 mm/s |
| Supply voltage | 12 / 24 VDC, 0-150 V (piezo) |
| Control interface | Step/direction, 0-10 V, RS485, USB |
| Housing material | Anodised aluminium, stainless steel |
| Operating temperature | 0 to +50 °C |
| Certifications | CE, RoHS |
Applications
Where this family is used
Optical alignment and focusing
Piezo and voice coil actuators position lenses and mirrors with nanometre stability and no backlash.
Analytical instrument sample handling
Linear micro actuators move syringes, probes and trays with repeatable microlitre accuracy.
Semiconductor and inspection stages
Vacuum-compatible actuators for wafer handling and optical inspection inside the chamber.
Medical and laboratory devices
Quiet, low-vibration actuators for dosing pumps, shutters and diagnostic instruments.
Selection Guide
How to specify correctly
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1
Define the resolution you actually need
A 1 µm actuator cannot hold 100 nm. Work backwards from the measurement tolerance, not from the catalogue's smallest step.
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2
Separate stroke from resolution
Piezo gives nanometres over micrometres, screw drives give microns over millimetres. Long stroke and nanometre resolution in one device needs a dual-stage design.
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3
Account for thermal drift
A 1 °C change moves a 50 mm aluminium frame by about 1 µm. If your tolerance is tighter, specify Invar or add a reference sensor.
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4
Choose the bearing before the motor
Crossed-roller and flexure bearings remove backlash and stick-slip. Plain bushings are cheaper and will limit repeatability.
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5
Order the controller with the actuator
Matched driver and actuator come with a calibration report. Mixing brands usually means re-tuning the loop and owning the resulting error.
Used in these industries
All industries →FAQ
Micro Actuators questions
What stroke can a piezo actuator achieve?
A monolithic stack reaches 2 µm to 100 µm depending on length, and a flexure-amplified design can reach 1 mm at reduced force. For longer travel, a piezo is used as a fine stage on top of a motorised coarse stage.
How do I hold a position with power off?
Use a stepper-driven screw actuator with a mechanical detent, or a piezo with a position-holding controller. Voice coil actuators are frictionless and cannot hold position without current, so they suit dynamic rather than static duty.
Are your actuators vacuum compatible?
Selected models are built with vacuum-compatible lubricants, low-outgassing cable and vented housings for 10⁻⁶ mbar operation. State the pressure and the bake-out temperature when you enquire.
What repeatability can I expect in a real machine?
The actuator repeatability is one part of the error budget. Frame stiffness, mounting flatness, thermal gradient and the metrology loop all contribute. Our application engineers will review your drawing and give a realistic figure rather than a catalogue number.
Do you supply driver electronics?
Yes. Matched drivers for stepper, brushless, voice coil and piezo actuators, with USB, RS485, 0-10 V or step/direction interfaces, and a calibration report covering the actuator and driver as a pair.
Other product families
Tell us the application and we will confirm the right variant.